1.Long life
2.Using less power supply high air flow
3.Especial two claw rotors
4.Easy operate
5.No produce any dust or oil mist
6.Semiconductor Vacuum Equipment - Adsorption and Transfer of Wafers
1.Long life
2.Using less
power supply high air flow
3.Especial
two claw rotors
4.Easy
operate
5.No produce
any dust or oil mist
|
MODEL |
C-VLR60 |
C-VLR150 |
CVLR251 |
|
|
AIR FLOW L/min |
50HZ |
1000 |
2500 |
3580 |
|
60HZ |
1200 |
3000 |
4350 |
|
|
ULTIMATE VACUUM(mmHg) |
690 |
690 |
690 |
|
|
OPERATE VACUUM(mmHg) |
670 |
670 |
670 |
|
|
OPERATE PRESSURE(kg/cm2) |
X |
X |
X |
|
|
PORT DIAMETER |
G1-1/4”PT |
G1-1/2”PT |
G2”PT |
|
|
WEIGHT(kg) |
75 |
130 |
140 |
|
|
POWER |
1.1/1.5kw |
3.0/3.6kw |
4.0/4.8kw |
|
|
SIZE(LxWxH)(mm) |
683x470x450 |
830x540x380 |
890x720x380 |
|